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Source link: http://sciencestage.com/d/4142101/ball-semiconductor-technology-and-its-application-to-mems.html
Source title:        Ball semiconductor technology and its application to MEMS - Ball, semiconductor, technology, and, its, application, to, MEMS, Abstract , This, paper, describes, Ball, semiconductor, technology, that, realizes, integrated, circuits, and, other, devices, on, 1-milimeter, sphere., Single, crystallization, no-contact, processing, spherical, lithography, 3D, VLSI, design, and, VLSI, by, clustering, are, five, key, enabling, technologies, of, the, Ball, semiconductor., Three, major, product, categories, of, the, Ball, integrated, circuits, RF, applications, and, MEMS, (Micro, Electro, Mechanical, System), are, described, here., Especially, electro-statically, levitated, 3-axis, accelerometer, is, mentioned, as, an, application, of, Ball, semiconductor, technology, to, MEMS - sciencestage.com Engineering

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