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Low energy kinetic threshold in the growth of cubic boron nitride films - Low, energy, kinetic, threshold, in, the, growth, of, cubic, boron, nitride, films, Abstract , We, report, the, growth, of, cubic, boron, nitride, (cBN), films, by, magnetron, sputtering, on, Si, (100), substrates., The, films, are, grown, in, the, presence, of, negative, substrate, bias, voltages, and, a, nitrogen, plasma, produced, by, an, electron, cyclotron, resonance, source., We, find, evidence, for, a, sharp, low-voltage, threshold, in, the, substrate, bias, (-105, V), beyond, which, the, samples, are, predominantly, cBN., The, structural, quality, of, the, cBN, films, is, optimized, in, a, narrow, range, of, voltages, near, this, threshold., We, discuss, the, important, role, of, energetic, ions, in, the, formation, of, cBN, in, light, of, recent, theoretical, findings. - sciencestage.com Engineering
http://sciencestage.com/d/5680596/low-energy-kinetic-threshold-in-the-growth-of-cubic-boron-nitride-films.html